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in the matrices of interest
4 The fundamental GEM requirements form the foundation of the GEM Standard
SEMI G66-96 (Reapproved 0823)
which includes:
FPDガラス基板をある枚数収納するカセットに適用される。選択された用語，定義並びに仕様概略が含まれている。枚葉用ガラス基板カセットの仕様は他文書で記述される予定である。
F04700 - SEMI F47 - 半導体プロセス装置電圧サグ対応力のための仕様 Revision:SEMI F47-0706 - Superseded in the matrices of interestglobal Facilities Technical Committee2012618global Audits and Reviews Subcommittee20128www. semiviews. org www. semi. org1999920067 & CVD & PVD CMP & 2 ACAC EMO Grandfather Clause Referenced SEMI Standards SEMI E51 Guide for Typical Facilities Services and Termination Matrix SEMI S2 Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment